As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The first of three volumes, MEMS: Introduction and Fundamentals covers the theoretical and conceptual underpinnings of the field, emphasizing the physical phenomena that dominate at the micro-scale. It also explores the mechanical properties of MEMS materials, modeling and simulation of MEMS, control theory, and bubble/drop transport in microchannels. Chapters were updated where necessary, and the book also includes two new chapters on microscale hydrodynamics and lattice Boltzmann simulations. This volume builds a strong foundation for further study and work in the MEMS field. MEMS: Introduction and Fundamentals comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB(R) technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication. MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies. MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

The ability to actively or passively manipulate a flow field to bring about a desired change is of immense technological importance. The potential benefits of improving flow control systems range from saving billions of dollars in fuel costs for land, air and sea vehicles to achieving more economically competitive and environmentally sound industrial processes involving fluid flows. This book provides a thorough treatment of the basics of flow control and control practices that can be used to produce desired effects. Among topics covered are transition delay, separation prevention, drag reduction, lift augmentation, turbulence suppression, noise abatement, and heat and mass transfer enhancement. The final chapter explores the frontiers of flow control strategies, especially as applied to turbulent flows. Intended for engineering and physics students, researchers and practitioners, Flow Control brings together in a single source a wealth of information on practices and developments in this very active field.

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies. MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

The ability to actively or passively manipulate a flow field to bring about a desired change is of immense technological and economical importance. This volume provides a thorough, up-to-date treatment of the basics of flow control and control practices that can be used to produce desired effects. The author explores the frontiers of flow control strategies, especially as applied to turbulent flows. Intended for engineering and physics students, researchers, and practitioners, Flow Control brings together in a single source a wealth of state-of-the-art information on this very active field.

Dynamical systems theory and flow control are two research areas of great current interest. These and other special situations are among the topics covered in this volume. Each article emphasizes the use of experiments to achieve better physical understanding of a particular class of flow problems. The topics covered were chosen because of their importance to the field, recent appeal, and potential for future development. The articles are comprehensive and coverage is pedagogical with a bias towards recent developments.

One cannot overemphasize the importance of studying fluids in motion or at rest for a variety of scientific and engineering endeavors. Fluid mechanics as an art reaches back into antiquity, but its rational formulation is a relatively recent undertaking. Much of the physics of a particular flow situation can be understood by conducting appropriate experiments. Flow visualization techniques offer a useful tool to establish an overall picture of a flow field and to delineate broadly its salient features before embarking on more detailed quantitative measurements. Among the single-point measurements that are particularly difficult are those in separated flows, non-Newtonian fluids, rotating flows, and nuclear aerosols. Pressure, shear stress, vorticity, and heat transfer coefficient are also difficult quantities to measure, particularly for time-dependent flows. These and other special situations are among the topics covered in this volume. Each article emphasizes the development of a particular measuring technique. The topics covered were chosen because of their importance to the field, recent appeal, and potential for future development. The articles are comprehensive and coverage is pedagogical with a bias towards recent developments.

Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.